Phosphatic microfossils from the Doushantuo Formation, Guizhou, China, have been reported with preserved cellular structure or even sub-cellular structure in micron scale. However, more details in sub-micro scale have not been reported as having been found. The Fossil embryos from the acid residue of the phosphorite rocks of the Neoproterozoic Doushantuo Formation in south China have been studied with a scanning electron microscope (SEM) and an atomic force microscope (AFM). Some ultra-structures in sub-micro scale have been found by AFM on the surface of the fossil embryos. There are four types of structures found on the surface of the selected fossil embryos, the sizes of which vary from 30 to 645 nm in diameter under our AFM. One of the structures is composed of several big sub-units integrated with each other, and the size of the big sub-units is from 250 to 645 nm. Meanwhile, we also found an ultra-layer structure on the surface of the big sub-units, the thickness of which was about 10 nm. Thus we speculate that it could most probably be of biological origin. Therefore, AFM provides a new method for direct observation of the ultra-structure of the Doushantuo fossils in the sub-micro scale.