High-frequency surface acoustic waves excited on thin-oriented LiNbO3 single-crystal layers transferred onto silicon

IEEE Trans Ultrason Ferroelectr Freq Control. 2007 Apr;54(4):870-6. doi: 10.1109/tuffc.2007.321.

Abstract

The need for high-frequency, wide-band filters has instigated many developments based on combining thin piezoelectric films and high acoustic velocity materials (sapphire, diamond-like carbon, silicon, etc.) to ease the manufacture of devices operating above 2 GHz. In the present work, a technological process has been developed to achieve thin-oriented, single-crystal lithium niobate (LiNbO3) layers deposited on (100) silicon wafers for the fabrication of radio-frequency (RF) surface acoustic wave (SAW) devices. The use of such oriented thin films is expected to favor large coupling coefficients together with a good control of the layer properties, enabling one to chose the best combination of layer orientation to optimize the device. A theoretical analysis of the elastic wave assumed to propagate on such a combination of material is first exposed. Technological aspects then are described briefly. Experimental results are presented and compared to the state of art.

Publication types

  • Evaluation Study
  • Research Support, Non-U.S. Gov't

MeSH terms

  • Acoustics / instrumentation*
  • Computer Simulation
  • Crystallization / methods*
  • Equipment Design
  • Equipment Failure Analysis
  • Materials Testing
  • Membranes, Artificial*
  • Models, Theoretical
  • Niobium / chemistry*
  • Oxides / chemistry*
  • Radiation Dosage
  • Radio Waves
  • Radiometry / methods
  • Silicon / chemistry*

Substances

  • Membranes, Artificial
  • Oxides
  • Niobium
  • lithium niobate
  • Silicon