The method of defining the error of aerosol extinction coefficient measured by differential optical absorption spectroscopy (DOAS) is described. Some factors which could bring errors to result, such as variation of source, integral time, atmospheric turbulence, calibration of system parameter, displacement of system, and back scattering of particles, are analyzed. The error of aerosol extinction coefficient, 0.03 km(-1), is determined by theoretical analysis and practical measurement.