The well-arrayed Pd and Au nanoparticle thin films were successfully prepared by making use of self-assembled PS-b-P4VP block copolymer (BCP) as a mask for the reduction of PdCl2 deposited on glass substrate. The films consisted of spherialcal nanoparticles with an average diameter of about 45 nm. For monitoring the size, shape and array formation of Pd nanopaticle films, this procedure was proved better to the conventional process in which PdCl2 impregnated in the channels of self assembled BCP film is reduced to form nanoparticle array. This observations of Pd nanoparticle array film formation is supported by the AFM and UV-VIS studies of Au nanoparticle array films formed by conventional method.