Based on experiments and 3D simulations, we show that a soft elastic film during adhesion and debonding from a rigid flat surface undergoes morphological transitions to pillars, labyrinths, and cavities, all of which have the same lateral pattern length scale, lambda close to lambda/H approximately 3 for thick films, H > 1 microm . The linear stability analysis and experiments show a new thin film regime where lambda/H approximately equal to 3 + 2pi(lambda/3 muH)1/4 (gamma is surface tension, mu is shear modulus) because of a significant surface energy penalty (for example, lambda/H approximately equal to 6 for H = 200 nm; mu = 1 MPa).