Preparation of TEM samples of metal-oxide interface by the focused ion beam technique

S Abolhassani; Philippe Gasser

doi:10.1111/j.1365-2818.2006.01599.x

Preparation of TEM samples of metal-oxide interface by the focused ion beam technique

J Microsc. 2006 Jul;223(Pt 1):73-82. doi: 10.1111/j.1365-2818.2006.01599.x.

Authors

S Abolhassani¹, Philippe Gasser

Affiliation

¹ Paul Scherrer Institut, Laboratory for Materials Behaviour, 5232 Villigen-PSI Switzerland. sousan.abolhassani@psi.ch

PMID: 16872434
DOI: 10.1111/j.1365-2818.2006.01599.x

Abstract

This paper describes a procedure to prepare metal-oxide interfaces for transmission electron microscopy by the focused ion beam technique. The advantage of this procedure is to allow the observation of metal-oxide interfaces of irradiated samples with a homogeneous thickness without the need to have an instrument inside laboratories that are specialized for the manipulation of irradiated materials. A transmission electron microscopy sample is prepared by this method and analysed.