High-precision methods and devices for in situ measurements of thermally induced aberrations in optical elements

Appl Opt. 2006 Jun 10;45(17):4092-101. doi: 10.1364/ao.45.004092.

Abstract

An optical system that comprises two devices for remote measurements, a broadband optical interferometer and a scanning Hartmann sensor, is described. The results of simultaneous measurements with both devices and the results of numerical modeling of sample surface heating are presented.