Nanofibrous non-woven matrices were prepared by electrospinning a regenerated silk fibroin (SF) solution, and the structural changes of SF nanofibers treated with water vapor were investigated using time-resolved IR and (13)C CP/MAS NMR spectroscopy. Conformational transitions of SF from random coil to beta-sheet structures were induced by water vapor treatment and were strongly dependent on the treatment time and temperature. Water vapor treatment provided a useful means of stabilizing the SF nanofiber matrices, resulting in the formation of matrices with a decreased solubility in water and increased mechanical strength. The adhesion and spreading of both normal human keratinocytes and fibroblasts onto the SF nanofiber matrices were also investigated, and the water vapor-treated SF nanofiber matrices showed good cellular compatibility, in comparison with traditional methanol-treated ones. This approach to controlling the conformational changes of SF nanofibers by water vapor treatment may be useful in the design and tailoring of novel materials for biomedical applications, including wound dressings and scaffolds for tissue engineering.