Compact soft x-ray transmission microscopy with sub-50 nm spatial resolution

Phys Med Biol. 2006 Mar 21;51(6):N99-107. doi: 10.1088/0031-9155/51/6/N01. Epub 2006 Feb 21.

Abstract

In this paper, the development of compact transmission soft x-ray microscopy (XM) with sub-50 nm spatial resolution for biomedical applications is described. The compact transmission soft x-ray microscope operates at lambda = 2.88 nm (430 eV) and is based on a tabletop regenerative x-ray source in combination with a tandem ellipsoidal condenser mirror for sample illumination, an objective micro zone plate and a thinned back-illuminated charge coupled device to record an x-ray image. The new, compact x-ray microscope system requires the fabrication of proper x-ray optical devices in order to obtain high-quality images. For an application-oriented microscope, the alignment procedure is fully automated via computer control through a graphic user interface. In imaging studies using our compact XM system, a gold mesh image was obtained with 45 nm resolution at x580 magnification and 1 min exposure. Images of a biological sample (Coscinodiscus oculoides) were recorded.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Diatoms / ultrastructure
  • Electron Probe Microanalysis / methods*
  • Image Processing, Computer-Assisted
  • Lasers
  • Microscopy
  • Microscopy, Electron, Transmission / methods
  • Optical Devices
  • Photons
  • Software
  • X-Rays*