The TiO2 membranes were prepared on glass, ceramic tile and aluminum pieces by Sol-Gel and PVD methods. A fast and exact evaluation on the photocatalytic self-cleaning performance of the membrane materials was achieved by FTIR-ATR technique using oleic acid which was laid on the surface of the membrane. The hydrophilic property of the samples was also determined by the contact angle with water. The results showed that both the TiO2 membrane prepared on glass by the Sol-Gel and PVD methods displayed good photo-induced hydrophilic property and degradation activity of oleic acid, and no difference in hydrophilic property, but the former was a little superior to the latter in photocatalytic activity. The photocatalytic conversion of oleic acid on the TiO2/glass, TiO2/ceramic tile and TiO2 aluminum piece were 92%, 85% and 46%, respectively after illumination 3.5 h, showing a distinct effect of support material property on TiO2 photocatalytic performance. The results suggested that the photocatalytic activity of TiO2 membrane coated on insulator support was higher than that coated on conductor support.