Self-assembled monolayers (SAMs) formed from 4,4'-terphenyl-substituted alkanethiols C6H5(C6H4)2-(CH2)nSH (TPn, n = 1-6) on polycrystalline (111) gold and silver substrates have been characterized by synchrotron-based high-resolution X-ray photoelectron spectroscopy. The intensities, binding energy positions, and width of most photoemission lines exhibited pronounced odd-even effects, i.e., systematic and periodic variation, depending on either odd or even number of the methylene units in the aliphatic linker of the TPn molecules. The detailed analysis of these effects provides important information on the bonding and arrangement of the chemisorbed sulfur headgroups in the TPn films and balance of the structural forces in alkanethiolate SAMs.