Monodisperse gold nanoparticles were prepared via electron beam irradiation of Au(I)-SR (R = -CnH2n+1) polymers with highly ordered supramolecular structures in transmission electron microscopy. The Au(I)-SR polymers were synthesized simply by mixing LiAuCl4 and an excess amount of alkanethiol in tetrahydrofuran. The sizes of the gold nanoparticles were controlled by changing the length of the alkyl group or by adjusting the energy of the electron beam.