The stability of self-assembled monolayers (SAMs) and multilayers formed on silicon surface by amino-terminated silanes and SAMs formed by alkyl and glycidyl terminated silanes were investigated in vitro with saline solution at 37 degrees C for up to 10 days. FTIR and XPS results indicated that amino-terminated SAMs and multilayers are very unstable if the alkyl chain is short ((CH2)3), while stable if the alkyl chain is long ((CH2)11). On the other hand, alkyl-terminated SAMs are very stable regardless of the alkyl chain length, and glycidyl terminated SAM retained approximately 77% of the organosilane molecules after 10 days. Hydrogen bonding between the organosilane monomer and silicon surface and among the organosilane monomers is believed to contribute to the instability of the SAM and multilayer formed by amino-terminated silane with a short alkyl chain ((CH2)3). Therefore, the widely used (3-aminopropyl) trimethoxysilane (APTMS) SAM and multilayer may not be suitable for implantable biomedical applications.