Suspended multiwalled carbon nanotubes as self-aligned evaporation masks

J Nanosci Nanotechnol. 2003 Aug;3(4):325-8. doi: 10.1166/jnn.2003.204.

Abstract

We describe the nanofabrication study of self-aligned electrodes on suspended multiwalled carbon nanotube structures. When metal is deposited on a suspended multiwalled carbon nanotube structure, the nanotube acts as an evaporation mask, resulting in the formation of discontinuous electrodes. The metal deposits on the nanotubes are removed with lift-off. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gapped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.

Publication types

  • Evaluation Study

MeSH terms

  • Chromium / chemistry
  • Coated Materials, Biocompatible / chemical synthesis
  • Coated Materials, Biocompatible / chemistry*
  • Crystallization / methods*
  • Electrochemistry / instrumentation*
  • Electrochemistry / methods
  • Equipment Design
  • Microelectrodes*
  • Nanotechnology / instrumentation*
  • Nanotechnology / methods*
  • Nanotubes, Carbon / chemistry*
  • Nanotubes, Carbon / ultrastructure*

Substances

  • Coated Materials, Biocompatible
  • Nanotubes, Carbon
  • Chromium