Laser terahertz-emission microscope for inspecting electrical faults in integrated circuits

Opt Lett. 2003 Nov 1;28(21):2058-60. doi: 10.1364/ol.28.002058.

Abstract

A laser terahertz-emission microscope (LTEM) system is proposed and developed for inspecting electrical faults in integrated circuits (IC). We test a commercial operational amplifier while the system is operating. Two-dimensional terahertz-emission images of the IC chip are clearly observed while the chip is scanned with a femtosecond laser. When one of the interconnection lines is cut, the damaged chip has a LTEM image different from that of normal chips. The results indicate that the LTEM system is a potential tool for IC inspection.