Frequency interference between two mesa-shaped quartz crystal microbalances

IEEE Trans Ultrason Ferroelectr Freq Control. 2003 Jun;50(6):668-75. doi: 10.1109/tuffc.2003.1209554.

Abstract

The multichannel quartz crystal microbalance (MQCM) is very attractive for biosensor applications. The principle of the MQCM design involves fabricating arrays of quartz microbalances on a single substrate, and it is important that the individual sensor performance is not influenced by the neighboring devices. Feasible ways to control the coupling of acoustical energy within a MQCM structure are to increase the difference in the resonance frequency between the electroded and unelectroded portions of the substrate; and a practical way to achieve this is to use mesa structures. In this paper, the frequency interference between two mesa-shaped quartz crystal microbalances is investigated using Mindlin's theory. The results show that even a very small mesa height (approximately 5% of the plate thickness) can greatly reduce the frequency interference and more effectively trap the acoustic energy. This allows for a broader design window and higher packing density for MQCM applications.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Biosensing Techniques / instrumentation
  • Biosensing Techniques / methods*
  • Computer Simulation
  • Crystallization
  • Crystallography / instrumentation
  • Crystallography / methods*
  • Elasticity
  • Energy Transfer
  • Equipment Design / methods
  • Equipment Failure Analysis / methods
  • Models, Theoretical*
  • Nanotechnology / instrumentation
  • Nanotechnology / methods
  • Quartz / chemistry*
  • Reproducibility of Results
  • Sensitivity and Specificity
  • Stress, Mechanical
  • Transducers*

Substances

  • Quartz