Chemical solution-deposited PbZr 0.53 Ti 0.47 O3 on La 0.5 Sr 0.5 Co O3. SIMS investigation of the effect of different precursor additives on the layer structure

C Pollak; B Malic; M Kosec; S Javoric; H Hutter

doi:10.1007/s00216-002-1517-2

Chemical solution-deposited PbZr 0.53 Ti 0.47 O3 on La 0.5 Sr 0.5 Co O3. SIMS investigation of the effect of different precursor additives on the layer structure

Anal Bioanal Chem. 2002 Oct;374(4):608-13. doi: 10.1007/s00216-002-1517-2. Epub 2002 Sep 13.

Authors

C Pollak¹, B Malic, M Kosec, S Javoric, H Hutter

Affiliation

¹ Department of Chemical Technology and Analysis, University of Technology Vienna, Getreidemarkt 9/E164-AC, 1060 Wien, Austria.

PMID: 12397478
DOI: 10.1007/s00216-002-1517-2

Abstract

Chemical solution-deposited thin films of PbZr(0.53)Ti(0.47)O(3)/La(0.5)Sr(0.5)CoO(3) on Pt/TiO(2)/SiO(2)/Si substrates have been investigated by dynamic SIMS. The PbZr(0.53)Ti(0.47)O(3) (PZT) is intended to serve as a ferroelectric layer for microelectronic or microelectromechanical applications; conducting La(0.5)Sr(0.5)CoO(3) (LSCO) is a buffer layer intended to eliminate fatigue effects which usually occur at the Pt/PZT interface. Depth profiles of the main components were obtained and revealed that significant diffusion occurred during the deposition and crystallisation processes. Two types of sample, with different thickness of PZT and different types of poly(vinyl alcohol) (PVA) added to the LSCO precursor, were investigated.