Applied physics. Testing the limits for resists
Science
.
2002 Jul 19;297(5580):349-50.
doi: 10.1126/science.1073842.
Authors
Elsa Reichmanis
1
,
Omkaram Nalamasu
Affiliation
1
Bell Labs, Lucent Technologies, Murray Hill, NJ 07974, USA. er@lucent.com
PMID:
12130770
DOI:
10.1126/science.1073842
No abstract available
Publication types
Comment