Miniaturization of surface acoustic waves rotary motor

Ultrasonics. 2002 Jun;39(8):591-4. doi: 10.1016/s0041-624x(02)00264-0.

Abstract

This paper presents the experimental study of a miniaturized surface acoustic waves (SAWs) rotary motor and the theoretical calculation. After the first success in SAW rotary motor operating at 9.85 MHz, a smaller rotary motor is designed. With the operating frequency of 30 MHz and the driving voltage of 120 V(p-p), the motor can rotate at a speed of 270 rpm.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Acoustics*
  • Equipment Design
  • Miniaturization
  • Rotation