Combined laser ablation and pulse modulated radio-frequency (RF) discharge for deposition of CNalpha films was studied by the use of optical emission spectroscopy. Chemically active nitrogen was produced by RF discharge, concentrated between two small electrodes. Influence of RF power, nitrogen pressure, modulation frequency and pulse rate on nitrogen species production was researched. For the same system plasma expansion rate, kinetic energy and concentration of carbon ions emitted by laser from graphite target were determined by Langmuir probes measurement.