Fourier-transform optical microsystems

Opt Lett. 1999 Jun 15;24(12):844-6. doi: 10.1364/ol.24.000844.

Abstract

The design, fabrication, and initial characterization of a miniature single-pass Fourier-transform spectrometer (FTS) that has an optical bench that measures 1 cm x 5 cm x 10 cm is presented. The FTS is predicated on the classic Michelson interferometer design with a moving mirror. Precision translation of the mirror is accomplished by microfabrication of dovetailed bearing surfaces along single-crystal planes in silicon. Although it is miniaturized, the FTS maintains a relatively high spectral resolution, 0.1 cm-1, with adequate optical throughput.

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Equipment Design
  • Helium
  • Interferometry
  • Lasers
  • Miniaturization / methods*
  • Neon
  • Optics and Photonics
  • Spectroscopy, Fourier Transform Infrared / instrumentation*

Substances

  • Helium
  • Neon