Longitudinal-bending mode micromotor using multilayer piezoelectric actuator

K Yao; B Koc; K Uchino

doi:10.1109/58.935724

Longitudinal-bending mode micromotor using multilayer piezoelectric actuator

IEEE Trans Ultrason Ferroelectr Freq Control. 2001 Jul;48(4):1066-71. doi: 10.1109/58.935724.

Authors

K Yao¹, B Koc, K Uchino

Affiliation

¹ International Center for Actuators and Transducers (ICAT), Materials Research Laboratory, Pennsylvania State University, University Park, PA 16802, USA. k-yao@imre.org.sg

PMID: 11477764
DOI: 10.1109/58.935724

Abstract

Longitudinal-bending mode ultrasonic motors with a diameter of 3 mm were fabricated using stacked multilayer piezoelectric actuators, which were self-developed from hard lead zirconate titanate (PZT) ceramic. A bending vibration was converted from a longitudinal vibration with a longitudinal-bending coupler. The motors could be bidirectionally operated by changing driving frequency. Their starting and braking torque were analyzed based on the transient velocity response. With a load of moment of inertia 2.5 x 10(-7) kgm2, the motor showed a maximum starting torque of 127.5 microNm. The braking torque proved to be a constant independent on the motor's driving conditions and was roughly equivalent to the maximum starting torque achievable with our micromotors.