Dynamical simulation of LACBED patterns in cross-sectioned heterostructures

Micron. 2000 Jun;31(3):211-6. doi: 10.1016/s0968-4328(99)00085-2.

Abstract

The Large Angle Convergent Beam Electron Diffraction (LACBED) technique has been applied to determination of the tetragonal mismatch in coherent Si/Si1-xGex/Si heterostructures. Two-dimensional (2D) dynamical simulation of the LACBED patterns has been performed and compared with the corresponding experimental ones. A good agreement is found in the whole simulated area, particularly as regards the splitting of the Bragg contours, due to the strain field present in the TEM cross-sections.