Comparison of results and models of solid-phase epitaxial growth of implanted Si layers induced by electron- and ion-beam irradiation
Phys Rev B Condens Matter
.
1993 Jun 1;47(21):14023-14031.
doi: 10.1103/physrevb.47.14023.
Authors
G Lulli
,
PG Merli
PMID:
10005741
DOI:
10.1103/physrevb.47.14023
No abstract available