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Controlled Layer-by-Layer Etching of MoS₂.
Lin T, Kang B, Jeon M, Huffman C, Jeon J, Lee S, Han W, Lee J, Lee S, Yeom G, Kim K. Lin T, et al. ACS Appl Mater Interfaces. 2015 Jul 29;7(29):15892-7. doi: 10.1021/acsami.5b03491. Epub 2015 Jul 14. ACS Appl Mater Interfaces. 2015. PMID: 26091282
Controlled MoS₂ layer etching using CF₄ plasma.
Jeon MH, Ahn C, Kim H, Kim KN, LiN TZ, Qin H, Kim Y, Lee S, Kim T, Yeom GY. Jeon MH, et al. Among authors: yeom gy. Nanotechnology. 2015 Sep 4;26(35):355706. doi: 10.1088/0957-4484/26/35/355706. Epub 2015 Aug 12. Nanotechnology. 2015. PMID: 26267409
Atomic layer etching of chrome using ion beams.
Park JW, Kim DS, Lee WO, Kim JE, Yeom GY. Park JW, et al. Among authors: yeom gy. Nanotechnology. 2019 Feb 22;30(8):085303. doi: 10.1088/1361-6528/aaf521. Epub 2018 Nov 30. Nanotechnology. 2019. PMID: 30523944
86 results