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Remote driven and read MEMS sensors for harsh environments.
Sensors (Basel). 2013 Oct 21;13(10):14175-88. doi: 10.3390/s131014175.
Sensors (Basel). 2013.
PMID: 24152935
Free PMC article.
High-Q measurements of fused-silica microspheres in the near infrared.
Vernooy DW, Ilchenko VS, Mabuchi H, Streed EW, Kimble HJ.
Vernooy DW, et al.
Opt Lett. 1998 Feb 15;23(4):247-9. doi: 10.1364/ol.23.000247.
Opt Lett. 1998.
PMID: 18084474
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