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Comparison of Erosion Behavior and Particle Contamination in Mass-Production CF₄/O₂ Plasma Chambers Using Y₂O₃ and YF₃ Protective Coatings.
Nanomaterials (Basel). 2017 Jul 14;7(7):183. doi: 10.3390/nano7070183.
Nanomaterials (Basel). 2017.
PMID: 28708079
Free PMC article.
Reduction of Defects in AlGaN Grown on Nanoscale-Patterned Sapphire Substrates by Hydride Vapor Phase Epitaxy.
Tasi CT, Wang WK, Tsai TY, Huang SY, Horng RH, Wuu DS.
Tasi CT, et al.
Materials (Basel). 2017 May 31;10(6):605. doi: 10.3390/ma10060605.
Materials (Basel). 2017.
PMID: 28772961
Free PMC article.
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Structural and Stress Properties of AlGaN Epilayers Grown on AlN-Nanopatterned Sapphire Templates by Hydride Vapor Phase Epitaxy.
Tasi CT, Wang WK, Ou SL, Huang SY, Horng RH, Wuu DS.
Tasi CT, et al.
Nanomaterials (Basel). 2018 Sep 10;8(9):704. doi: 10.3390/nano8090704.
Nanomaterials (Basel). 2018.
PMID: 30201865
Free PMC article.
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85% internal quantum efficiency of 280-nm AlGaN multiple quantum wells by defect engineering.
Wang TY, Tasi CT, Lin CF, Wuu DS.
Wang TY, et al. Among authors: tasi ct.
Sci Rep. 2017 Oct 31;7(1):14422. doi: 10.1038/s41598-017-14825-8.
Sci Rep. 2017.
PMID: 29089552
Free PMC article.
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