Sealing of hard CrN and DLC coatings with atomic layer deposition.
Härkönen E, Kolev I, Díaz B, Swiatowska J, Maurice V, Seyeux A, Marcus P, Fenker M, Toth L, Radnoczi G, Vehkamäki M, Ritala M.
Härkönen E, et al. Among authors: seyeux a.
ACS Appl Mater Interfaces. 2014 Feb 12;6(3):1893-901. doi: 10.1021/am404906x. Epub 2014 Jan 27.
ACS Appl Mater Interfaces. 2014.
PMID: 24428348