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High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer.
Micromachines (Basel). 2018 Nov 7;9(11):579. doi: 10.3390/mi9110579.
Micromachines (Basel). 2018.
PMID: 30405006
Free PMC article.
Optimization of the Close-to-Carrier Phase Noise in a CMOS-MEMS Oscillator Using a Phase Tunable Sustaining-Amplifier.
Sobreviela G, Riverola M, Torres F, Uranga A, Barniol N.
Sobreviela G, et al. Among authors: riverola m.
IEEE Trans Ultrason Ferroelectr Freq Control. 2017 May;64(5):888-897. doi: 10.1109/TUFFC.2017.2667881. Epub 2017 Feb 13.
IEEE Trans Ultrason Ferroelectr Freq Control. 2017.
PMID: 28207393
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Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors.
Torres F, Uranga A, Riverola M, Sobreviela G, Barniol N.
Torres F, et al. Among authors: riverola m.
Sensors (Basel). 2016 Oct 13;16(10):1690. doi: 10.3390/s16101690.
Sensors (Basel). 2016.
PMID: 27754377
Free PMC article.
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