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Wafer-scale graphene quality assessment using micro four-point probe mapping.
Mackenzie DMA, Kalhauge KG, Whelan PR, Østergaard FW, Pasternak I, Strupinski W, Bøggild P, Jepsen PU, Petersen DH. Mackenzie DMA, et al. Among authors: petersen dh. Nanotechnology. 2020 May 29;31(22):225709. doi: 10.1088/1361-6528/ab7677. Epub 2020 Mar 13. Nanotechnology. 2020. PMID: 32167935
Electrical Homogeneity Mapping of Epitaxial Graphene on Silicon Carbide.
Whelan PR, Panchal V, Petersen DH, Mackenzie DMA, Melios C, Pasternak I, Gallop J, Østerberg FW, U Jepsen P, Strupinski W, Kazakova O, Bøggild P. Whelan PR, et al. Among authors: petersen dh. ACS Appl Mater Interfaces. 2018 Sep 19;10(37):31641-31647. doi: 10.1021/acsami.8b11428. Epub 2018 Sep 4. ACS Appl Mater Interfaces. 2018. PMID: 30130090
Atomic Layer Deposition of Ruthenium with TiN Interface for Sub-10 nm Advanced Interconnects beyond Copper.
Wen LG, Roussel P, Pedreira OV, Briggs B, Groven B, Dutta S, Popovici MI, Heylen N, Ciofi I, Vanstreels K, Østerberg FW, Hansen O, Petersen DH, Opsomer K, Detavernie C, Wilson CJ, Elshocht SV, Croes K, Bömmels J, Tőkei Z, Adelmann C. Wen LG, et al. Among authors: petersen dh. ACS Appl Mater Interfaces. 2016 Oct 5;8(39):26119-26125. doi: 10.1021/acsami.6b07181. Epub 2016 Sep 21. ACS Appl Mater Interfaces. 2016. PMID: 27598509
A variable probe pitch micro-Hall effect method.
Witthøft ML, Østerberg FW, Bogdanowicz J, Lin R, Henrichsen HH, Hansen O, Petersen DH. Witthøft ML, et al. Among authors: petersen dh. Beilstein J Nanotechnol. 2018 Jul 20;9:2032-2039. doi: 10.3762/bjnano.9.192. eCollection 2018. Beilstein J Nanotechnol. 2018. PMID: 30116693 Free PMC article.
3ω correction method for eliminating resistance measurement error due to Joule heating.
Guralnik B, Hansen O, Henrichsen HH, Beltrán-Pitarch B, Østerberg FW, Shiv L, Marangoni TA, Stilling-Andersen AR, Cagliani A, Hansen MF, Nielsen PF, Oprins H, Vermeersch B, Adelmann C, Dutta S, Borup KA, Mihiretie BM, Petersen DH. Guralnik B, et al. Among authors: petersen dh. Rev Sci Instrum. 2021 Sep 1;92(9):094711. doi: 10.1063/5.0063998. Rev Sci Instrum. 2021. PMID: 34598479
26 results