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Silicon Wafer Etching Rate Characteristics with Burst Width Using 150 kHz Band High-Power Burst Inductively Coupled Plasma.
Micromachines (Basel). 2021 May 22;12(6):599. doi: 10.3390/mi12060599.
Micromachines (Basel). 2021.
PMID: 34067412
Free PMC article.
Soluble model of four-fermion interactions in de Sitter space.
Inagaki T, Mukaigawa S, Muta T.
Inagaki T, et al. Among authors: mukaigawa s.
Phys Rev D Part Fields. 1995 Oct 15;52(8):R4267-R4271. doi: 10.1103/physrevd.52.r4267.
Phys Rev D Part Fields. 1995.
PMID: 10019703
No abstract available.
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