A new setup for localized implantation and live-characterization of keV energy multiply charged ions at the nanoscale.
Guillous S, Bourin C, Ban D'Etat B, Benyagoub A, Cassimi A, Feierstein C, Gardés E, Giglio E, Girard S, Grygiel C, Houel A, Lebius H, Méry A, Monnet I, Ramillon JM, Rangama J, Ropars F, Verzeroli E, Viteau M, Delobbe A.
Guillous S, et al. Among authors: mery a.
Rev Sci Instrum. 2016 Nov;87(11):113901. doi: 10.1063/1.4966675.
Rev Sci Instrum. 2016.
PMID: 27910696