Multi spectral holographic ellipsometry for a complex 3D nanostructure.
Jung J, Kim W, Kim J, Lee S, Shin I, Yoon C, Jeong S, Hidaka Y, Numata M, Ueyama S, Choi C, Lee M.
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Opt Express. 2022 Dec 19;30(26):46956-46971. doi: 10.1364/OE.474640.
Opt Express. 2022.
PMID: 36558634
Free article.