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Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication.
Micromachines (Basel). 2021 Apr 8;12(4):414. doi: 10.3390/mi12040414.
Micromachines (Basel). 2021.
PMID: 33918068
Free PMC article.
Effect of Signals on the Encapsulation Performance of Parylene Coated Platinum Tracks for Active Medical Implants.
Nanbakhsh K, Kluba M, Pahl B, Bourgeois F, Dekker R, Serdijn W, Giagka V.
Nanbakhsh K, et al.
Annu Int Conf IEEE Eng Med Biol Soc. 2019 Jul;2019:3840-3844. doi: 10.1109/EMBC.2019.8857702.
Annu Int Conf IEEE Eng Med Biol Soc. 2019.
PMID: 31946711
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