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2015 | 1 |
2019 | 1 |
2024 | 0 |
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Technological Platform for Vertical Multi-Wafer Integration of Microscanners and Micro-Optical Components.
Micromachines (Basel). 2019 Mar 13;10(3):185. doi: 10.3390/mi10030185.
Micromachines (Basel). 2019.
PMID: 30871213
Free PMC article.
Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems.
Baranski M, Bargiel S, Passilly N, Gorecki C, Jia C, Frömel J, Wiemer M.
Baranski M, et al. Among authors: fromel j.
Appl Opt. 2015 Aug 1;54(22):6924-34. doi: 10.1364/AO.54.006924.
Appl Opt. 2015.
PMID: 26368111
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