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2017 | 1 |
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Confocal laser displacement sensor using a micro-machined varifocal mirror.
Appl Opt. 2017 Aug 20;56(24):6911-6916. doi: 10.1364/AO.56.006911.
Appl Opt. 2017.
PMID: 29048034
Resonant Varifocal Micromirror with Piezoresistive Focus Sensor.
Nakazawa K, Sasaki T, Furuta H, Kamiya J, Sasaki H, Kamiya T, Hane K.
Nakazawa K, et al. Among authors: furuta h.
Micromachines (Basel). 2016 Mar 30;7(4):57. doi: 10.3390/mi7040057.
Micromachines (Basel). 2016.
PMID: 30407430
Free PMC article.
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