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Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO2 ALD Properties for Improved Electrical and Reliability Parameters.
Materials (Basel). 2022 Nov 23;15(23):8325. doi: 10.3390/ma15238325.
Materials (Basel). 2022.
PMID: 36499822
Free PMC article.
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