Visualizing Ferroelectric Uniformity of Hf1-xZrxO2 Films Using X-ray Mapping.
Chang SJ, Teng CY, Lin YJ, Wu TM, Lee MH, Lin BH, Tang MT, Wu TS, Hu C, Tang EY, Tseng YC.
Chang SJ, et al.
ACS Appl Mater Interfaces. 2021 Jun 23;13(24):29212-29221. doi: 10.1021/acsami.1c08265. Epub 2021 Jun 13.
ACS Appl Mater Interfaces. 2021.
PMID: 34121385