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ITO Thin Films for Low-Resistance Gas Sensors.
Materials (Basel). 2022 Dec 29;16(1):342. doi: 10.3390/ma16010342.
Materials (Basel). 2022.
PMID: 36614681
Free PMC article.
High Oxygen Sensitivity of TiO2 Thin Films Deposited by ALD.
Almaev AV, Yakovlev NN, Almaev DA, Verkholetov MG, Rudakov GA, Litvinova KI.
Almaev AV, et al.
Micromachines (Basel). 2023 Sep 29;14(10):1875. doi: 10.3390/mi14101875.
Micromachines (Basel). 2023.
PMID: 37893312
Free PMC article.
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