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Year | Number of Results |
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2015 | 1 |
2018 | 1 |
2019 | 1 |
2024 | 0 |
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Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers.
Microsyst Nanoeng. 2019 Oct 7;5:43. doi: 10.1038/s41378-019-0095-9. eCollection 2019.
Microsyst Nanoeng. 2019.
PMID: 31636932
Free PMC article.
A small-gap electrostatic micro-actuator for large deflections.
Conrad H, Schenk H, Kaiser B, Langa S, Gaudet M, Schimmanz K, Stolz M, Lenz M.
Conrad H, et al. Among authors: schimmanz k.
Nat Commun. 2015 Dec 11;6:10078. doi: 10.1038/ncomms10078.
Nat Commun. 2015.
PMID: 26655557
Free PMC article.
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Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration.
Uhlig S, Gaudet M, Langa S, Schimmanz K, Conrad H, Kaiser B, Schenk H.
Uhlig S, et al. Among authors: schimmanz k.
Micromachines (Basel). 2018 Apr 18;9(4):190. doi: 10.3390/mi9040190.
Micromachines (Basel). 2018.
PMID: 30424123
Free PMC article.
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