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Impact of Pulse Parameters of a DC Power Generator on the Microstructural and Mechanical Properties of Sputtered AlN Film with In-Situ OES Data Analysis.
Materials (Basel). 2023 Apr 11;16(8):3015. doi: 10.3390/ma16083015.
Materials (Basel). 2023.
PMID: 37109853
Free PMC article.
Machine Learning Assisted Classification of Aluminum Nitride Thin Film Stress via In-Situ Optical Emission Spectroscopy Data.
Yang YP, Lu TY, Lo HH, Chen WL, Wang PJ, Lai W, Fuh YK, Li TT.
Yang YP, et al. Among authors: lo hh.
Materials (Basel). 2021 Aug 8;14(16):4445. doi: 10.3390/ma14164445.
Materials (Basel). 2021.
PMID: 34442969
Free PMC article.
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