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High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area.
Micromachines (Basel). 2022 Sep 21;13(10):1561. doi: 10.3390/mi13101561.
Micromachines (Basel). 2022.
PMID: 36295914
Free PMC article.
Combined 'moth-eye' structured and graded index-layer anti-reflecting coating for high index glasses.
Kraus M, Diao Z, Weishaupt K, Spatz JP, Täschner K, Bartzsch H, Schmittgens R, Brunner R.
Kraus M, et al. Among authors: bartzsch h.
Opt Express. 2019 Nov 25;27(24):34655-34664. doi: 10.1364/OE.27.034655.
Opt Express. 2019.
PMID: 31878652
Free article.
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Sputter deposition of stress-controlled piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications.
Barth S, Bartzsch H, Gloess D, Frach P, Herzog T, Walter S, Heuer H.
Barth S, et al. Among authors: bartzsch h.
IEEE Trans Ultrason Ferroelectr Freq Control. 2014 Aug;61(8):1329-34. doi: 10.1109/TUFFC.2014.3040.
IEEE Trans Ultrason Ferroelectr Freq Control. 2014.
PMID: 25073140
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Sputter deposition of silicon oxynitride gradient and multilayer coatings.
Weber J, Bartzsch H, Frach P.
Weber J, et al. Among authors: bartzsch h.
Appl Opt. 2008 May 1;47(13):C288-92. doi: 10.1364/ao.47.00c288.
Appl Opt. 2008.
PMID: 18449261
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