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2021 | 1 |
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Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime.
Sensors (Basel). 2021 Apr 6;21(7):2566. doi: 10.3390/s21072566.
Sensors (Basel). 2021.
PMID: 33917550
Free PMC article.
On Frequency-Based Interface Circuits for Capacitive MEMS Accelerometers.
Qiao Z, Boom BA, Annema AJ, Wiegerink RJ, Nauta B.
Qiao Z, et al. Among authors: boom ba.
Micromachines (Basel). 2018 Sep 25;9(10):488. doi: 10.3390/mi9100488.
Micromachines (Basel). 2018.
PMID: 30424421
Free PMC article.
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