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Deposition Mechanism and Properties of Plasma-Enhanced Atomic Layer Deposited Gallium Nitride Films with Different Substrate Temperatures.
Molecules. 2022 Nov 22;27(23):8123. doi: 10.3390/molecules27238123.
Molecules. 2022.
PMID: 36500217
Free PMC article.
Tantalum-Doped TiO2 Prepared by Atomic Layer Deposition and Its Application in Perovskite Solar Cells.
Hsu CH, Chen KT, Lin LY, Wu WY, Liang LS, Gao P, Qiu Y, Zhang XY, Huang PH, Lien SY, Zhu WZ.
Hsu CH, et al.
Nanomaterials (Basel). 2021 Jun 7;11(6):1504. doi: 10.3390/nano11061504.
Nanomaterials (Basel). 2021.
PMID: 34200248
Free PMC article.
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