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Evolution Mechanism of Sputtered Film Uniformity with the Erosion Groove Size: Integrated Simulation and Experiment.
Molecules. 2023 Nov 18;28(22):7660. doi: 10.3390/molecules28227660.
Molecules. 2023.
PMID: 38005382
Free PMC article.
On the Microcrystal Structure of Sputtered Cu Films Deposited on Si(100) Surfaces: Experiment and Integrated Multiscale Simulation.
Zhu G, Han M, Xiao B, Gan Z.
Zhu G, et al.
Molecules. 2023 Jun 15;28(12):4786. doi: 10.3390/molecules28124786.
Molecules. 2023.
PMID: 37375341
Free PMC article.
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