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Deposition Mechanism and Properties of Plasma-Enhanced Atomic Layer Deposited Gallium Nitride Films with Different Substrate Temperatures.
Molecules. 2022 Nov 22;27(23):8123. doi: 10.3390/molecules27238123.
Molecules. 2022.
PMID: 36500217
Free PMC article.
Crystallinity Effect on Electrical Properties of PEALD-HfO2 Thin Films Prepared by Different Substrate Temperatures.
Zhang XY, Han J, Peng DC, Ruan YJ, Wu WY, Wuu DS, Huang CJ, Lien SY, Zhu WZ.
Zhang XY, et al.
Nanomaterials (Basel). 2022 Nov 3;12(21):3890. doi: 10.3390/nano12213890.
Nanomaterials (Basel). 2022.
PMID: 36364666
Free PMC article.
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