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2019 | 1 |
2020 | 1 |
2024 | 0 |
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Research Status and Development Trend of MEMS Switches: A Review.
Micromachines (Basel). 2020 Jul 17;11(7):694. doi: 10.3390/mi11070694.
Micromachines (Basel). 2020.
PMID: 32708999
Free PMC article.
Review.
The Hybrid Fabrication Process of Metal/Silicon Composite Structure for MEMS S&A Device.
Hu T, Fang K, Zhang Z, Jiang X, Zhao Y.
Hu T, et al.
Micromachines (Basel). 2019 Jul 13;10(7):469. doi: 10.3390/mi10070469.
Micromachines (Basel). 2019.
PMID: 31337075
Free PMC article.
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