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Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS.
Micromachines (Basel). 2020 Aug 24;11(9):799. doi: 10.3390/mi11090799.
Micromachines (Basel). 2020.
PMID: 32846964
Free PMC article.
Review.
MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion.
Chiappim W, Watanabe M, Dias V, Testoni G, Rangel R, Fraga M, Maciel H, Dos Santos Filho S, Pessoa R.
Chiappim W, et al.
Nanomaterials (Basel). 2020 Feb 17;10(2):338. doi: 10.3390/nano10020338.
Nanomaterials (Basel). 2020.
PMID: 32079219
Free PMC article.
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