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The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine.
Choi YC, Kim JS, Kwon SY, Kong SH. Choi YC, et al. Micromachines (Basel). 2021 Oct 17;12(10):1261. doi: 10.3390/mi12101261. Micromachines (Basel). 2021. PMID: 34683313 Free PMC article.
In this paper we report on the improvement of performance by minimizing scallop size through deep reactive-ion etching (DRIE) of rotors in micro-wind turbines based on micro-electro-mechanical systems (MEMS) technology. The surface profile of an MEMS rotor can be controlle …
In this paper we report on the improvement of performance by minimizing scallop size through deep reactive-ion etching (DRIE) of rotors in m …