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zhongxuan zhou
(2 results)?
Design and Fabrication of a Novel Poly-Si Microhotplate with Heat Compensation Structure.
Micromachines (Basel). 2022 Nov 27;13(12):2090. doi: 10.3390/mi13122090.
Micromachines (Basel). 2022.
PMID: 36557388
Free PMC article.
A High-Reliability RF MEMS Metal-Contact Switch Based on Al-Sc Alloy.
Hou Z, Zhang Y, Si C, Han G, Zhao Y, Lu X, Liu J, Ning J, Wei T.
Hou Z, et al.
Micromachines (Basel). 2023 May 23;14(6):1098. doi: 10.3390/mi14061098.
Micromachines (Basel). 2023.
PMID: 37374683
Free PMC article.
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Effects of Mask Material on Lateral Undercut of Silicon Dry Etching.
Zhang Y, Hou Z, Si C, Han G, Zhao Y, Lu X, Liu J, Ning J, Yang F.
Zhang Y, et al. Among authors: hou z.
Micromachines (Basel). 2023 Jan 25;14(2):306. doi: 10.3390/mi14020306.
Micromachines (Basel). 2023.
PMID: 36838006
Free PMC article.
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